Fabrication of Three-Dimensional Imprint Lithography Templates by Colloidal Dispersions

 Fabrication of Three-Dimensional Imprint Lithography Templates by Colloidal Dispersions A. Marcia Almanza-Workman, Taussig P. Carl, Albert H. Jeans, Robert L. Cobene HP Laboratories HPL-2011-32 Flexible displays, Self aligned imprint lithography, stamps, fluorothermoplastics, latex Self-aligned imprint lithography (SAIL) enables patterning and alignment of submicron-sized features on flexible substrates in the roll-to roll (R2R) environment. Soft molds made of elastomers have been used as stamps to pattern three-dimensional masks. Durability of these stamps is one factor that limits their efficiency in a R2R process. Fluorothermoplastics are low cost imprint stamp materials with great mechanical strength and chemical compatibility but with low gas permeability that trap air bubbles in the photopolymer during the imprint process. This paper describes the strategy for increasing gas permeability of fluorothermoplastics by introducing voids in the stamp by using aqueous colloidal dispersions of fluorothermoplastic nanoparticles. The hard fluorinated particles, whose modulus is too high to deform during drying, remain as hard spheres and lead to a porous packing when drying is complete. The selection of additives to eliminate cracks created during water evaporation is also described in this paper. External Posting Date: March 6, 2011 [Fulltext] Approved for External Publication Internal Posting Date: March 6, 2011 [Fulltext] Copyright 2011 Hewlett-Packard Development Company, L.P. Report Documentation Page Form Approved OMB No. 0704-0188 Public reporting burden for the collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden, to Washington Headquarters Services, Directorate for Information Operations and Reports, 1215 Jefferson Davis Highway, Suite 1204, Arlington VA 22202-4302. Respondents should be aware that notwithstanding any other provision of law, no person shall be subject to a penalty for failing to comply with a collection of information if it does not display a currently valid OMB control number. 1. REPORT DATE MAR 2011 2. REPORT TYPE 3. DATES COVERED 00-00-2011 to 00-00-2011 4. TITLE AND SUBTITLE Fabrication of Three-Dimensional Imprint Lithography Templates by Colloidal Dispersions 5a. CONTRACT NUMBER